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IEEE
2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2014; ; ;10.1109/EuroSimE.2014.6813847
FEM simulation and measurement validation of a cMUT cell
S.P. Mao
X. Rottenberg
V. Rochus
B. Nauwelaers
H.A.C. Tilmans
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